The utility model discloses a polycrystal ingot furnace mass flow controller filter and relates to production devices of polycrystal ingot furnaces. The polycrystal ingot furnace mass flow controller filter is characterized in that a filter body is added at the front end of a mass flow controller, and the filter body is connected with the mass flow controller through a clamp and a seal ring. One end of the filter body is the same as the mass flow controller in caliber, and the other end of the filter body is the same as an argon supply pipeline in the caliber. The filter is one of ultrafilters and can filter micro impurity particles in argon. The filter can bear pressure more than 0.25MPa. The polycrystal ingot furnace mass flow controller filter has the advantages that the filter body is added at the front end of the mass flow controller, and therefore impurities in the argon can be purified further, microfunction circuit (MFC) breakdowns can be avoided, equipment failure rates can be reduced, maintenance cost can be saved, and production cost can be reduced.