多晶铸锭炉质量流量控制器过滤器

Polycrystal ingot furnace mass flow controller filter

Abstract

本实用新型公开了一种多晶铸锭炉质量流量控制器过滤器,涉及多晶铸锭炉生产装置,质量流量控制器前端增加过滤器;过滤器通过卡箍及密封圈连接到质量流量控制器。过滤器的一端口径与质量流量控制器口径相同,另一端口径与氩气进气管道相同。所述过滤器是指精密过滤器中的一种。所述过滤器能滤去氩气的微小杂质颗粒。所述过滤器所承受的压力为0.25MPa以上。本实用新型的有益效果是:质量流量控制器前端增加过滤器,可以进一步净化氩气里边的杂质,避免MFC出现故障,减少设备故障率,节约维修费用,降低生产成本。
The utility model discloses a polycrystal ingot furnace mass flow controller filter and relates to production devices of polycrystal ingot furnaces. The polycrystal ingot furnace mass flow controller filter is characterized in that a filter body is added at the front end of a mass flow controller, and the filter body is connected with the mass flow controller through a clamp and a seal ring. One end of the filter body is the same as the mass flow controller in caliber, and the other end of the filter body is the same as an argon supply pipeline in the caliber. The filter is one of ultrafilters and can filter micro impurity particles in argon. The filter can bear pressure more than 0.25MPa. The polycrystal ingot furnace mass flow controller filter has the advantages that the filter body is added at the front end of the mass flow controller, and therefore impurities in the argon can be purified further, microfunction circuit (MFC) breakdowns can be avoided, equipment failure rates can be reduced, maintenance cost can be saved, and production cost can be reduced.

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